Feedthrough

For compact equipment that must transmit rotary motion in limited space while maintaining vacuum sealing. Applied to research equipment, small vacuum chambers, and precision drive modules.

Standard Type (MML)

Shaft Diameter	004	005	006
A	Ø4	Ø5	Ø6
E	0.5Dp. / 10Lg.	0.5Dp. / 10Lg.	0.5Dp. / 10Lg.

Model Number	MML004NN	MML005NN	MML006NN
Torque capacity (kg·cm)	5.8	6.4	6.4
Vacuum pressure Pa,(Torr)	10⁻⁶, (10⁻⁸)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	2
Temperature range (°C)	0 – 150
Gas compatibility	Inert Gas
Bearing type	686	686	686
Bearing material	SUS440C
Housing material	SUS303
Shaft material	SUS630

Threaded Type (MSL)

Shaft Diameter	004	005	006
A	Ø4	Ø5	Ø6
B	76.5	76.5	76.5
E	0.5Dp. / 10Lg.	0.5Dp. / 10Lg.	0.5Dp. / 10Lg.
F	15	15	15

Model Number	MSL004NN	MSL005NN	MSL006NN
Torque capacity (kg·cm)	5.8	6.4	6.4
Vacuum pressure Pa,(Torr)	10⁻⁶, (10⁻⁸)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	2
Temperature range (°C)	0 – 150
Gas compatibility	Inert Gas
Bearing type	686	686	686
Bearing material	SUS440C
Housing material	SUS303
Shaft material	SUS630

• Reactive-gas compatible feedthroughs are also available. (Specify application when requesting a quotation or placing an order.)

Installed by passing through an equipment wall or plate. It connects the vacuum chamber to the external drive while blocking vacuum leakage around the rotating shaft.

Ø6 – Ø10

Shaft Diameter	006	010
A	Ø6	Ø10
B	97.5	97.5
C	57.5	57.5
D	M32 × 1.5	M38 × 1.5
E	0.5Dp. × 12Lg. (flat)	3W × 1.8Dp. × 14Lg. (keyway)
F	20	25
J	55	60
K	10	10
P	49	55

Model Number	MML006NN	MNF006NN	MML010NN	MNF010NN
Torque capacity (kg·cm)	9.7	9.7	62	62
Vacuum pressure Pa,(Torr)	10⁻⁶, (10⁻⁸)	10⁻⁵, (10⁻⁷)	10⁻⁶, (10⁻⁸)	10⁻⁵, (10⁻⁷)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	2.5	2	2.5	2
Temperature range (°C)	0 – 150
Gas compatibility	Inert	Active	Inert	Active
Bearing type	627	627	6001	6001
Bearing material	SUS440C
Housing material	SUS303	SUS304	SUS303	SUS304
Shaft material	SUS630

Ø12 – Ø20 (water cooling)

Shaft Diameter	012	020
A	Ø12	Ø20
B	179	211
C	109	121
D	M25 × 1.5	M30 × 1.5
E (keyway)	4W × 2.5Dp. × 20Lg.	6W × 3.5Dp. × 25Lg.
F	40	55
J	48	63
K	74	82
L	36.5	40.5

Model Number	MTL012NN	MTF012NN	MTL020NN	MTF020NN
Torque capacity (kg·cm)	124	124	615	615
Vacuum pressure Pa,(Torr)	10⁻⁶, (10⁻⁸)	10⁻⁵, (10⁻⁷)	10⁻⁶, (10⁻⁸)	10⁻⁵, (10⁻⁷)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	2.5	2	2.5	2
Temperature range (°C)	0 – 150
Gas compatibility	Inert	Active	Inert	Active
Bearing type	6002	6002	6005	6005
Bearing material	SUS440C
Housing material	SUS303	SUS304	SUS303	SUS304
Shaft material	SUS630

• Tapped bore type model number should change to MF0-000-WN.

A type fixed to equipment by flange fastening. With high installation stability and easy maintenance, it is widely applied to industrial vacuum and process equipment.

Shaft Diameter	006	010	012	020
A	Ø6	Ø10	Ø12	Ø20
B	97.5	119.5	133.5	151.5
C	57.5	69.5	73.5	81.5
D	38	44	48	63
E	0.5Dp. × 12Lg.	3W × 1.8Dp. × 14Lg.	4W × 2.5Dp. × 20Lg.	6W × 3.5Dp. × 25Lg.
F	20	25	30	35
J	80	80	90	105
K	10	10	10	10
L	18	24	27	31
N	PD60/4-□10	PD60/4-□10	PD70/4-□10	PD85/4-□10

Model Number	MFL006NN	MFL010NN	MFL012NN	MFL020NN	MFF006NN	MFF010NN	MFF012NN	MFF020NN
Torque capacity (kg·cm)	9.7	62	124	615	9.7	62	124	615
Vacuum pressure Pa,(Torr)	10⁻⁶, (10⁻⁸)	10⁻⁶, (10⁻⁸)	10⁻⁶, (10⁻⁸)	10⁻⁶, (10⁻⁸)	10⁻⁵, (10⁻⁷)	10⁻⁵, (10⁻⁷)	10⁻⁵, (10⁻⁷)	10⁻⁵, (10⁻⁷)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	2	2	2	2	2.5	2.5	2.5	2.5
Temperature range (°C)	0 – 150
Gas compatibility	Inert	Inert	Inert	Inert	Active	Active	Active	Active
Bearing type	627	6001	6002	6005	627	6001	6002	6005
Bearing material	SUS440C
Housing material	SUS303	SUS303	SUS303	SUS303	SUS304	SUS304	SUS304	SUS304
Shaft material	SUS630

• Conflat flange or any other defined configuration may be specified and is available as an option.
• Tapped bore for tube fitting is available for high-temperature or high-rotation-speed applications (model number changes to MF0-000-WN).
• Shaft length and terminations may be specified by the user.

For heavy-process equipment requiring large shaft diameters and high torque. Dedicated bearings for VAC/ATM each maintain stable sealing even under high load and high-speed rotation.

Shaft Diameter	020	025	030	040	050
A	Ø20	Ø25	Ø30	Ø40	Ø50
B	255	288	321	357	406
C	135	138	141	157	166
D	85	95	105	125	140
E (keyway)	6W × 3.5Dp. × 50Lg.	7W × 4Dp. × 63Lg.	10W × 5Dp. × 80Lg.	12W × 5Dp. × 90Lg.	14W × 5.5Dp. × 110Lg.
F	60	75	90	100	120
J	145	160	160	185	210
K	18	18	20	22	24
L	48	50	50	55.5	59.5
M	29	29	29	33	33
N	PD120/6-□12	PD135/6-□12	PD135/6-□12	PD160/8-□12	PD185/8-□12

Model Number	MFL020WH	MFL025WH	MFL030WH	MFL040WH	MFL050WH
Torque capacity (kg·cm)	616	1066	1706	3413	6106
Vacuum pressure Pa,(Torr)	10⁻⁵, (10⁻⁷)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	3
Temperature range (°C)	0 – 150
Bearing type (VAC)	7206CDF	7207CDF	7208CDF	7210CDF	7212CDF
Bearing type (ATM)	6205	6206	6207	6009	6211
Bearing material	SUJ2
Housing material	SUS303
Shaft material	SUS630

• A coaxial shaft cooling system is available for high-temperature or high-rotational-speed applications.

A hollow-shaft feedthrough whose central through-structure lets wiring, shafts, and gas lines pass together. It is inserted into the equipment housing in cartridge form.

Shaft Diameter	010	020	025	030	040	050	075
A	Ø10	Ø20	Ø25	Ø30	Ø40	Ø50	Ø75
B	78	82.5	88	93	96	98	115
C	64	68.5	74	79	80	82	96
D	48	58	63	73	88	98	137
E	34	44	49	54	69	79	109
F	10	10	10	10	12	12	15

Model Number	MTL010CN	MTL020CN	MTL025CN	MTL030CN	MTL040CN	MTL050CN	MTL075CN
Torque capacity (kg·cm)	—
Vacuum pressure Pa,(Torr)	10⁻⁵, (10⁻⁷)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	3
Temperature range (°C)	0 – 150
Gas compatibility	Inert Gas
Bearing type	16003	6906	6907	6908	6910	6912	6918
Bearing material	SUJ2
Housing material	SUS303
Shaft material	SUS630

• G · recommended shaft diameter, H · recommended housing diameter (fine tolerances per drawing).

A type combining a hollow-shaft structure with flange mounting. It fixes stably to equipment via flange while utilizing the central through-structure.

Shaft Diameter	010	020	025	030	040	050	075
A	Ø10	Ø20	Ø25	Ø30	Ø40	Ø50	Ø75
B	78	82.5	88	93	96	98	115
C	64	68.5	74	79	80	82	96
D	51	63	71	78	90	103	143
E	34	44	49	54	69	79	109
F	10	10	10	10	12	12	15
J	90	105	120	120	145	160	210
K	10	10	10	10	10	12	12
L	20	22.5	26	27	27	26.5	33
M	PD70/4-□10	PD85/4-□10	PD100/4-□10	PD100/4-□10	PD120/4-□10	PD135/4-□10	PD185/4-□10

Model Number	MFL010CN	MFL020CN	MFL025CN	MFL030CN	MFL040CN	MFL050CN	MFL075CN
Torque capacity (kg·cm)	—
Vacuum pressure Pa,(Torr)	10⁻⁶, (10⁻⁸)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	3
Temperature range (°C)	0 – 150
Gas compatibility	Inert Gas
Bearing type	16003	6906	6907	6908	6910	6912	6918
Bearing material	SUJ2
Housing material	SUS303
Shaft material	SUS630

• Conflat flange is available as an option.
• Tapped bore type model number should change to MFL-000-WN.

A hollow-shaft feedthrough for single-side support structures or special mounting conditions. With a reactive-gas-capable seal structure, it is chosen for equipment where standard flange types are difficult to apply.

Shaft Diameter	020	025	030	040	050
A	Ø20	Ø25	Ø30	Ø40	Ø50
B	123.5	126	130.5	141	147.5
C	109.5	112	116.5	125	131.5
D	78	90	96	106	132
E	44	49	54	67	79
F	10	10	10	12	12
J	120	145	145	160	185
K	10	10	10	12	12
L	14.5	13	14	12	12.5
N	PD100/4-□10	PD120/4-□12	PD120/4-□12	PD135/4-□12	PD160/8-□12

Model Number	MFF020CC	MFF025CC	MFF030CC	MFC040CC	MFF050CC
Torque capacity (kg·cm)	—
Vacuum pressure Pa,(Torr)	10⁻⁵, (10⁻⁷)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	2.5
Temperature range (°C)	0 – 150
Gas compatibility	Reactive Gas
Bearing type	7206CDB	7207CDB	7208CDB	7210CDB	7212CDB
Bearing material	SUJ2
Housing material	SUS304 (SUS316 : Option)
Shaft material	SUS630

• Conflat flange is available as an option.
• Tapped bore type model number should change to MFL-000-MC.

A dual-coaxial structure that is small and lightweight yet offers high rotational accuracy and low runout. A representative application is in-vacuum wafer transfer robots (SCARA type).

Model	MFF012NN
Vacuum pressure Pa,(Torr)	10⁻⁶, (10⁻⁸)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	2
Temperature range (°C)	0 – 150
Gas compatibility	Reactive Gas
Bearing type	(out) ATM6007, VAC6908 / (in) 6901
Bearing material	SUJ2
Housing material	SUS304
Shaft material	SUS630

A three-axis structure providing rotational accuracy and low runout with high rigidity. An optional aluminum housing enables a lighter assembly, and it is applied to LCD large-glass-substrate transfer robots (Frog arm type).

Model	MFL200NN
Vacuum pressure Pa,(Torr)	10⁻⁶, (10⁻⁸)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	2
Temperature range (°C)	0 – 150
Gas compatibility	Inert Gas
Bearing type	(out) 6840 / (in) 6906
Bearing material	SUJ2
Housing material	A2024
Shaft material	SUS630

A combined-drive feedthrough coupling a high-rigidity three-axis coaxial spindle with a 50 mm linear stroke. For Cluster Tools, it is applied to 300 mm wafers, LCD large-substrate processing, and in-vacuum transfer robots.

Model	MFF022NN
Vacuum pressure Pa,(Torr)	10⁻⁸, (10⁻⁸)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	2
Temperature range (°C)	0 – 150
Gas compatibility	Reactive Gas
Bearing type	(L) VAC6814, ATM6816 / (M) VAC6808, ATM6909 / (S) 6804
Bearing material	SUJ2
Housing material	SUS304
Shaft material	SUS630
Bellows stroke	50 mm
Bellows life	OVER 10⁶

A product for transmitting rotary motion in high- and ultra-high-vacuum environments. With low-vapor-pressure UHV ferrofluid and a differential-pumping structure, it supports vacuum down to the 10⁻⁷ Pa (10⁻⁹ Torr) class.

Model	MSCV-012WC
Vacuum pressure Pa,(Torr)	10⁻⁷, (10⁻⁹)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	2.5
Temperature range (°C)	0 – 150
Gas compatibility	Inert Gas
Bearing type	7303CDB
Bearing material	SUJ2
Housing material	SUS304
Shaft material	SUS630

• Ferrofluid for UHV operation, which has low vapor pressure at high temperature, is used.
• The main chamber is protected from bake-out gas by differential pumping.
• Baking condition is the same as for a TMP.
• The differential pumping line and main pumping line can be unified up to a 10⁻⁹ Torr vacuum level.
• The compact equipment can be provided with a simplified seal construction for UHV processing.

A purge-gas structure in the seal unit suppresses process-gas/contaminant ingress into the seal area and deposition buildup. Suitable for deposition processes such as reactive gases, CVD, and furnaces.

Model	MSFV-020WC
Vacuum pressure Pa,(Torr)	10⁻⁶, (10⁻⁸)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	2.5
Temperature range (°C)	0 – 150
Gas compatibility	Reactive Gas
Bearing type	7006CDB
Bearing material	SUJ2
Housing material	SUS304
Shaft material	SUS630

• Longer life is realized by installing a purge-gas structure in the seal unit.
• This prevents process gas from flowing into the seal area and eliminates deposition near the seal.
• Intended for reactive-gas, CVD and furnace applications that generate depositing material.

A feedthrough that supplies or exhausts high-purity gas through the rotating shaft. Applied to process equipment that must connect a gas line while maintaining rotary motion.

Model	MSFH-100NH
Vacuum pressure Pa,(Torr)	10⁻⁶, (10⁻⁸)
Leakage rate [He] (Pa·m³/sec)	<10⁻¹²
(Torr·ℓ/sec)	<10⁻¹¹
Pressure capacity [Static] (kg/cm²)	3.5
Temperature range (°C)	0 – 150
Gas compatibility	Inert Gas
Bearing type	(left) 7015CDB / (right) 6211
Bearing material	SUJ2
Housing material	SUS304
Shaft material	SUS630

• Highly purified gas can be supplied into a chamber through this feedthrough.
• A typical application is a rotary gas union for light-bulb manufacturing equipment.